The MEMS and NEMS Technical Group (MN) program will highlight recent advances in the broad areas of micro/nanoelectromechanical systems (MEMS/NEMS), especially latest fundamental studies of novel materials, processes, devices, and emerging functions and applications of MEMS/NEMS, in various areas. Our program will include resonant low-dimensional materials and parametric and nonlinear MEMS/NEMS resonators which create intriguing possibilities of integrating these devices with existing fluidic, electronic and optical on-chip networks. The program continues to embrace latest progresses in optical MEMS/ NEMS, micro/nanophotonics, optomechanics, quantum MEMS/NEMS, resonant systems, CMOS-MEMS, mesoscopic dynamics and dissipation processes, inertial sensors, harsh-environment transducers, and MEMS/NEMS-enabled energy technologies, etc. It also aims to capture some of the latest advances in soft materials, flexible and implantable MEMS/NEMS for biosensing, bio-inspired microsystems, wearable and wireless healthcare.
MN1: MEMS Technology for Sensing and Frequency Control
- Cristian Cassella, Northeastern University, “AlScN Piezoelectric Metamaterials for Next Generation RF Systems”
- Ruochen Lu, The University of Texas at Austin, “Scaling Acoustics into mm-Wave: Higher-Order Lamb Mode Devices in Piezoelectric Thin Films”
MN2+2D: Emerging Materials for MEMS/NEMS Devices
- Yanan (Laura) Wang, University of Nebraska – Lincoln, “Phononic Crystals based on Two-Dimensional Materials”
- Rui Yang, Shanghai Jiao Tong University, China, “Atomically-Thin MoS2 Nanoelectromechanical Resonators”
MN3+AS+NS+SE: Scanning Probe Study in MEMS/NEMS
- Jürgen Brugger, École Polytechnique Fédérale de Lausanne, Switzerland
- Huan Hu, Zhejiang University, China, “Nanodevice Fabrication and Nanostructure Fine-Tuning using Helium Ion Microsope”
MN4+QS: Dynamics and Nonlinearity in MEMS
- Xueyong Wei, Xi’an Jiaotong University, China, “Synchronization Phenomena in Micromechanical Resonators: Fundamental and Application”
- Eva Weig, Technical University of Munich, Germany, “Can a Single Nanomechanical Mode Generate a Frequency Comb?”
MN5+SE: MEMS and BioMEMS Processes, Materials, and Devices
- Azadeh Ansari, The Georgia Institute of Technology, “Fabrication, Actuation and Control of 3D-printed Microcale Bristle Robots”
- Xia Liu, École Polytechnique Fédérale de Lausanne, Switzerland, “Thermomechanical Nanostraining in Two-Dimensional Materials and Devices”
MN6: Hybrid M/NEMS and M/NEMS Heterogeneous Integration
- Roozbeh Tabrizian, University of Florida
MN7: MEMS and NEMS Poster Session